아래의 각 도금 두께 측정기에 대한 사양을 확인하시고 시리즈 이름을 클릭하시면 자세한 설명을 보실 수 있는 해당 페이지로 이동합니다.
참고: A 시리즈 XRF는 SEMI S2, S8 호환 가능
TUBE | G 시리즈 | B 시리즈 | P 시리즈 | L 시리즈 | K 시리즈 Collimated/Optics |
O 시리즈 | M 시리즈 | W 시리즈 | 시리즈 |
---|---|---|---|---|---|---|---|---|---|
Micro-Focused X-ray Anode | W/Cr/Mo/Rh | W/Cr/Mo/Rh | W/Cr/Mo/Rh | W/Cr/Mo/Rh | W/Cr/Mo/Rh | W/Cr/Mo/Rh | W/Cr/Mo/Rh | W/Cr/Mo/Rh | W/Cr/Mo/Rh |
X-ray Path | Bottom Up | Top Down | Top Down | Top Down | Top Down | Top Down | Top Down | Top Down | Top Down |
DETECTOR | |||||||||
Si Drift Detector | Standard | Standard | Standard | Standard | Coll: Standard Optics: N/A |
Standard | N/A | N/A | N/A |
Large Window Si Drift Detector | Optional | Optional | Optional | Optional | Coll: Optional Optics: Standard |
Optional | Standard | Standard | Standard |
BEAM SIZE | |||||||||
Single Collimator | Standard | Standard | N/A | N/A | N/A | N/A | N/A | N/A | N/A |
Multi-Collimators | N/A | Optional | Standard | Standard | Coll: Standard Optics: N/A |
N/A | N/A | N/A | N/A |
Capillary Optics FWHM | N/A | N/A | N/A | Optional | Coll: N/A Optics: 15um |
80um | 15um | 7.5um | 7.5um |
FOCAL DEPTH | |||||||||
Focus Laser / Auto Focus | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard |
Single Fixed Focal Depth | Standard | Standard | N/A | N/A | Coll: N/A Optics: Standard |
Standard | Standard | Standard | Standard |
Variable Focal Depths | N/A | Optional | Standard | Standard | Coll: Standard Optics: N/A |
N/A | N/A | N/A | N/A |
VIDEO MAGNIFICATION | |||||||||
30X Micro | Standard | Standard | Standard | Standard | Coll: Standard Optics: N/A |
N/A | N/A | N/A | N/A |
55X Micro | Optional | Optional | Optional | Optional | Coll: Optional Optics: N/A |
Standard | N/A | N/A | N/A |
140X Micro | N/A | N/A | N/A | N/A | Coll: N/A Optics: Standard |
N/A | Standard | Standard | Standard |
7X Digital Zoom | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard |
9X Macro | N/A | N/A | N/A | N/A | Coll: N/A Optics: Standard |
N/A | Standard | Standard | Standard |
Table View | N/A | N/A | N/A | Optional | Coll: Optional Optics: Standard |
N/A | Standard | Standard | Standard |
STAGE & CHAMBER DIMENSIONS | |||||||||
Z Control | Automatic | Automatic | Automatic | Automatic | Automatic | Automatic | Automatic | Programmable | Programmable |
Z Travel | 1″ | 5.2″ | 5.2″ | 9.75″ | Coll: 8.75″ Optics: 8.5″ |
5.2″ | 4.9″ | 3.5″ | 3.5″ |
Base | N/A | Fixed | Programmable | Programmable | Programmable | Programmable | Programmable | Programmable | Programmable |
Standard XY Travel | N/A | N/A | 5×6″ | 10×10″ | 12×12″ | 5×6″ | 6.5×6.5″ | 12×16″ | 23×23″ |
Optional XY Travel | 1.5×1.5″ | N/A | 10×10″ | N/A | N/A | 10×10″ | N/A | N/A | N/A |
Optional Max XY Travel | N/A | N/A | 16×16″ | N/A | N/A | 16×16″ | 16×16″ | N/A | N/A |
Precision | N/A | N/A | 0.0004″ | 0.0004″ | Coll: 0.0004″ Optics: <80u" |
0.0004″ | 0.0001″ | 40u” | 40u” |
Chamber Dimensions HWD | 4x13x12 " | 5.5x12x13 " | 5.5x12x13 " | 10x22x24 " | 9x24x24 " | 5.5x12x13 " | 5.4x12x13 " | 4x36x29 " | 4x55x58 " |
TOTAL WEIGHT | |||||||||
25kg | 34kg | 52 - 70kg | 110kg | 120kg | 52 - 70kg | 70kg | 190kg | 1000kg |