XRF for Semiconductors / Wafers

Our XRF coating thickness measurement systems measure these semiconductor finishes:

M Series

Provides unparalleled precision for small feature (15μm FWHM) analysis; achieves < 1% relative standard deviation for thickness less than 1 μ inch in shortest time.

W Series

Uses poly-capillary optics to focus the X-ray beam to 7.5 µm FWHM, the world’s smallest beam size for coating thickness analysis using XRF technology.

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