XRF for Semiconductors / Wafers

Our XRF coating thickness measurement systems measure these semiconductor finishes:

M Series

Provides unparalleled precision for small feature (15μm FWHM) analysis; achieves < 1% relative standard deviation for thickness less than 1 μ inch in shortest time.

O Series

Ideally suited to the precise measurement of ultra thin (<100nm) coatings, or where measurement time is limited to 1-5 seconds.

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