The M Series is the ultimate in high performance plating thickness measurements for the smallest features. The poly-capillary optics in the M Series is more advanced than the O Series, focusing the x-ray beam down to7.5μm FWHM. To measure features on that scale, a 140x magnification camera with an even higher digital zoom is included. The field of view becomes more restricted with higher magnification, so a second camera takes a macro-image of the part to be measured. The dual-camera system allows operators to see the entire part, click the image to zoom in with the high-mag camera, and pinpoint the feature to be measured.

The high-precision programmable X-Y stage can be used to select and measure multiple points; the pattern recognition software can also do this automatically. There is a 2-D mapping system that can be used to see the topography of a coating over the surface area of a part such as a silicon wafer.

The standard configuration includes the 15μm optics, and a high resolution SDD detector to process the higher count rates. A programmable X-Y sample stage is also standard. The optics system has a close focal distance, so samples measured with the M Series must be flat.

Now available with extended stage option

Application Performance

ENEPIG Electroless Nickel
μm Au μm Pd μm Ni μm NiP μm %P
Ave 0.043 0.08 3.72 10.202 10.17
StdDev 0.0005 0.0009 0.00010 0.1089 0.29
Range 0.0015 0.0030 0.040 0.3863 0.9900
%RSD 1.05% 1.13% 0.03% 1.07% 2.85%


Questions? Want a Demo? Interested in a Trade-in?

            The M Series XRF is best suited to customers with these requirements:

            • Very small parts/features such as those found in semiconductors, connectors, or PCBs
            • Requirement to test many samples or locations per new lot of material
            • Very thin coatings (<100nm)
            • Very short measurement times (1-5 seconds)
            • Guaranteed to meet IPC-4552, 4553, 4554 and 4556
            • ASTM B568 and ISO 3497
            • The desire to upgrade an old XRF's performance and efficiency – and get a generous trade-in bonus!

            Product Specifications

            X-ray excitation: 50W W target Flex-Beam Capillary Optics @15 FWHM at 17 KeV
            Optional: Cr, Mo, or Rh
            Detector: Silicon drifted detector with 135eV resolution
            Number of analysis
            layers and elements:
            5 layers (4 layers + base) and 10 elements in each layer with composition analysis of up to 25 elements simultaneously
            Filters/Collimators: 4 primary filters
            Output Focal Depth: Fixed at 0.15″ (3.81mm)
            Digital Pulse Processing: 4096 CH digital multi-channel analyser with flexible shaping time Automatic signal processing including dead time correction and escape peak correction
            Computer: Intel, CORE i5 3470 Processor (3.2GHz), 8GB DDR3 Memory, Microsoft Windows 10 Prof, 64-bit equivalent
            Camera optics: 1/4″ (6mm) CMOS-1280×720 VGA resolution, 250X with Dual Camera or 45X with Single Camera on 381mm (15″) screen
            Video Magnification: 140X Micro, 7X digital Zoom, 9X Macro & Table View
            Power Supply: 150W, 100-240 volts, with frequency range of 47Hz to 63Hz
            Working Environment: 68°F (20°C) to 77°F (25°C) and up to 98% RH, non-condensing
            Weight: 70kg
            Programmable XY: Table size: 431 mm (17″) x 406mm (16″) | Travel: 165mm (6.5″) x 165mm (6.5″) high precision
            Now available with extended stage option
            Internal Dimensions: Height: 137mm (5.4″), Width: 310mm (12″), Depth: 340mm (13″)
            External Dimensions: Height: 500mm (20″), Width: 450mm (18″), Depth: 600mm ( 24″)

            Do you have specific questions for us?

            Contact Us