M SERIES XRF

M Series XRF

Bowman brand XRF for small parts

The M Series is the ultimate in high performance for the smallest x-ray spot sizes. The poly-capillary optics in the M Series is more advanced than the O Series, focusing the x-ray beam down to 15μm FWHM. To measure features on that scale, a 150x magnification camera is included. The field of view becomes more limited with higher magnification, so a second camera takes a macro-image of the part to be measured. The dual-camera system allows operators to see the entire part, click the image to zoom in with the high-mag camera, and pinpoint the feature to be measured.

The high-precision programmable X-Y stage can be used to select and measure multiple points; the pattern recognition software can also do this automatically. There is a 2-D mapping system that can be used to see the topography of a coating over the surface area of a part such as a silicon wafer.

The standard configuration includes the 15μm Optics, and a high resolution SDD detector to process the higher count rates. A micro/macro camera system has one camera with 150x magnification and even higher digital zoom. A programmable X-Y sample stage is also standard. The Optics system has a close focal distance, so samples measured with the the M Series must be flat.

Now available with extended stage option

Application Performance

ENEPIG Electroless Nickel
μm Au μm Pd μm Ni μm NiP μm %P
Ave 0.0427 0.08 3.72 10.2015 10.17
StdDev 0.00045 0.0009 0.000985 0.1089 0.29
Range 0.0015 0.003 0.0395 0.3863 0.99
%RSD 1.053% 1.121% 0.265% 1.067% 2.85%

 

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The M Series XRF is best suited to customers with these requirements:

  • Very small parts/features such as those found in semiconductors, connectors, or PCBs
  • Requirement to test many samples or locations per new lot of material
  • Very thin coatings (<100nm)
  • Very short measurement times (1-5 seconds)
  • Guaranteed to meet IPC-4552A, 4553A, 4554 and 4556
  • ASTM B568, DIN 50987 and ISO 3497

Product Specification

X-ray excitation: 50 W Mo target Flex-Beam Capillary Optics @15 FWHM
Detector: Silicon drifted detector with 135eV resolution
Number of analysis
layers and elements:
5 layers (4 layers + base) and 10 elements in each layer with composition analysis of up to 25 elements simultaneously
Filters/Collimators: 4 primary filters
Focal Depths: Fixed at 0.05″ (1.27mm)
Digital Pulse Processing: 4096 CH digital multi-channel analyser with flexible shaping time Automatic signal processing including dead time correction and escape peak correction
Computer: Intel, CORE i5 3470 Processor (3.2GHz), 8GB DDR3 Memory, Microsoft Windows 10 Prof, 64-bit equivalent
Camera optics: 1/4″ (6mm) CMOS-1280×720 VGA resolution, 250X with Dual Camera or 45X with Single Camera on 381mm (15″) screen
Power Supply: 150W, 100-240 volts, with frequency range of 47Hz to 63Hz
Working Environment: 68°F (20°C) to 77°F (25°C) and up to 98% RH, non-condensing
Weight: 70kg
Programmable XY: Table size: 431 mm (17″) x 406mm (16″) | Travel: 165mm (6.5″) x 165mm (6.5″) high precision
Now available with extended stage option
Internal Dimensions: Height: 140mm (5.5″), Width: 310mm (12″), Depth: 340mm (13″)
External Dimensions: Height: 500mm (20″), Width: 450mm (18″), Depth: 600mm ( 24″)