M SERIES XRF


The M Series is the ultimate in high performance at the absolute smallest x-ray spot sizes. The poly-capillary optics system installed in the M Series is more advanced than the O Series, and can focus the x-ray beam down to 15μm FWHM. To measure features on that size scale, a 150x high magnification camera is included. The field of view becomes more limited with higher magnification, so another camera is installed to take a macro-image of a part to be measured. The dual-camera system allows operators to see an entire part, and then click on the image to zoom in with the high-mag camera and pinpoint the feature to be measured.

The high-precision programmable X-Y stage can be used to accurately select and measure multiple points, or use the pattern recognition program to let the software do the work for you. There is a 2-D mapping system that can be used to visually see the topography of a coating over the surface area of a part such as a silicon wafer.

The standard configuration includes the 15μm Optics, along with a high resolution SDD detector that can process the higher count rates. A dual micro/macro camera system has one camera with 150x magnification and even higher digital zoom. A high precision programmable X-Y sample stage also comes standard. The Optics system has a very close focal distance, so it is a requirement for the M Series that samples be very flat.

Application Performance

μ Au μ Pd μ Ni μ NiP %P
Ave 0.0427 0.08 3.72 10.2015 10.17
StdDev 0.00045 0.0009 0.000985 0.1089 0.29
Range 0.0015 0.003 0.0395 0.3863 0.99
%RSD 1.053% 1.121% 0.265% 1.067% 2.85%

 

Want more?

The M Series XRF is best suited to customers with these requirements:

  • Very small parts/features such as those found in semiconductors, connectors, or PCBs
  • Requirement to test many samples or locations per new lot of material
  • Very thin coatings (<100 μm)
  • Very short measurement times (1-5 seconds)
  • Guaranteed to meet IPC 4552-A

Product Specification

X-ray excitation: 50 W Mo target Flex-Beam Capillary Optics @15 FWHM
Detector: Silicon drifted detector with 135eV resolution
Number of analysis
layers and elements:
5 layers (4 layers + base) and 10 elements in each layer with composition analysis of up to 25 elements simultaneously
Filters/Collimators: 4 primary filters
Focal Depths: Fixed at 0.05″
Digital Pulse Processing: 4096 CH digital multi-channel analyser with flexible shaping time Automatic signal processing including dead time correction and escape peak correction
Computer: Intel, CORE i5 3470 Processor (3.2GHz), 8GB DDR3 Memory, Microsoft Windows 10 Prof, 64-bit equivalent
Camera optics: 1/4″ CMOS-1280×720 VGA resolution, 250X with Dual Camera or 45X with Single Camera on 15″ screen
Power Supply: 150W, 100-240 volts, with frequency range of 47Hz to 63Hz
Working Environment: 50°F (10°C) to 104°F (40°C) and up to 98% RH, non-condensing
Weight: 70kg
Programmable XY: Table size: 17″ x 16″ | Travel: 6.5″ x 6.5″ high precision
Internal Dimensions: Height: 140mm (5.5″), Width: 310mm (12″), Depth: 340mm (13″)
External Dimensions: Height: 500mm (20″), Width: 450mm (18″), Depth: 600mm ( 24″)