M Series XRF
The M Series is the ultimate in high performance plating thickness measurements for the smallest features. The poly-capillary optics in the M Series is more advanced than the O Series, focusing the x-ray beam down to7.5μm FWHM. To measure features on that scale, a 140x magnification camera with an even higher digital zoom is included. The field of view becomes more restricted with higher magnification, so a second camera takes a macro-image of the part to be measured. The dual-camera system allows operators to see the entire part, click the image to zoom in with the high-mag camera, and pinpoint the feature to be measured.
The high-precision programmable X-Y stage can be used to select and measure multiple points; the pattern recognition software can also do this automatically. There is a 2-D mapping system that can be used to see the topography of a coating over the surface area of a part such as a silicon wafer.
The standard configuration includes the 15μm optics, and a high resolution LSDD detector to process the higher count rates. A programmable X-Y sample stage is also standard. The optics system has a close focal distance, so samples measured with the M Series must be flat.
Now available with extended stage option
Application Performance
ENEPIG | Electroless Nickel | ||||
---|---|---|---|---|---|
μm Au | μm Pd | μm Ni | μm NiP | μm %P | |
Ave | 0.043 | 0.08 | 3.72 | 10.202 | 10.17 |
StdDev | 0.0005 | 0.0009 | 0.00010 | 0.1089 | 0.29 |
Range | 0.0015 | 0.0030 | 0.040 | 0.3863 | 0.9900 |
%RSD | 1.05% | 1.13% | 0.03% | 1.07% | 2.85% |
Questions? Want a Demo? Interested in a Trade-in?
The M Series XRF is best suited to customers with these requirements:
- Very small parts/features such as those found in semiconductors, connectors, or PCBs
- Requirement to test many samples or locations per new lot of material
- Very thin coatings (<100nm)
- Very short measurement times (1-5 seconds)
- Guaranteed to meet IPC-4552, 4553, 4554 and 4556
- ASTM B568 and ISO 3497
- The desire to upgrade an old XRF's performance and efficiency – and get a generous trade-in bonus!
Product Specifications
X-ray excitation: | 50W W-target Capillary Optics @15µm FWHM at 17 KeV Optional: Cr, Mo, or Rh |
Detector: | Large window Silicon drifted detector with 190eV resolution or better |
Number of analysis layers and elements: |
5 layers (4 layers + base) and 10 elements in each layer with composition analysis of up to 30 elements simultaneously |
Filters: | 4 primary filters |
Output Focal Depth: | Fixed at 0.15″ (3.81mm) |
Digital Pulse Processing: | 4096 CH digital multi-channel analyser with flexible shaping time Automatic signal processing including dead time correction and escape peak correction |
Computer: | Intel CORE i5 9th gen. desktop processor, solid state hard drive, 16GB RAM, Microsoft Windows 11 Professional 64bit equivalent |
Camera optics: | 1/4″ (6mm) CMOS-1280×720 VGA resolution, 250X with Dual Camera or 45X with Single Camera on 381mm (15″) screen |
Video Magnification: | 140X Micro, 7X digital Zoom, 9X Macro & Table View |
Power Supply: | 150W, 100-240 volts, with frequency range of 47Hz to 63Hz |
Working Environment: | 68°F (20°C) to 77°F (25°C) and up to 98% RH, non-condensing |
Weight: | 70kg |
Programmable XY: | Table size: 432 mm (17″) x 406mm (16″) | Travel: 165mm (6.5″) x 165mm (6.5″) high precision |
Max Extended Programmable XY: | Table size: 813mm (32″)x 781mm (30.75″)| Travel: 406mm (16″)x 406mm (16″) Now available with max extended stage option |
Internal Dimensions: | Height: 140mm (5.5″), Width: 305m (12″), Depth: 330mm (13″) |
External Dimensions: | Height: 508mm (20″), Width: 457mm (18″), Depth: 610mm ( 24″) |