W SERIES MICRO XRF

W Series XRF

Bowman brand XRF System

The W Series Micro XRF uses poly-capillary optics to focus the X-ray beam to 7.5 µm FWHM, the world’s smallest beam size for coating thickness analysis using XRF technology. A 150X magnification camera is used to measure features on that scale; it is accompanied by a secondary, low-magnification camera for live-viewing samples and birds-eye macro-view imaging. Bowman’s dual-camera system lets operators see the entire part, click the image to zoom with the high-mag camera, and pinpoint the feature to be programmed and measured.

A programmable X-Y stage with precision less than +/- 1 µm for each axis is used to select and measure multiple points; Bowman pattern recognition software and auto-focus features also do this automatically. The system’s 3D mapping capability can be used to view the topography of a coating on a part such as a silicon wafer.

The standard configuration of W Series instruments includes 7.5 µm optics with molybdenum anode tube (chromium and tungsten are optional) and a high-resolution, large-window Silicon Drift Detector which processes more than 2 million counts per second.

The W Series Micro XRF is the 7th model in Bowman’s XRF instrument suite. Like others in the portfolio, it simultaneously measures up to 5 coating layers and runs advanced Xralizer software to quantify coating thickness from the detected photons. Xralizer software combines intuitive visual controls with time-saving shortcuts, extensive search capability, and “one-click” reporting. The software also simplifies user creation of new applications.

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The W Series Micro XRF is most ideal for companies with:

  • The need to test wafers, lead frames, PCBs
  • Requirements to quickly test multiple samples or locations
  • Desire to automate measurement on multiple samples
  • The need to comply with IPC-4552A, 4553A, 4554 and 4556
  • ASTM B568, DIN 50987 and ISO 3497

Product Specification

X-ray Excitation: 50 W Mo target Flex-Beam Capillary Optics @7.5 FWHM
Optional: Cr or W
Detector: Large window Silicon drifted detector with 135eV resolution or better
Focal Depth: Fixed at 0.02″ (0.05mm)
Video Magnification: 150X with micro-view camera on 20″ (508mm) screen (up to 600x digital zoom)
10~20X with macro-view camera
Working Environment: 68°F (20°C) to 77°F (25°C) and up to 98% RH, non-condensing
Weight: 190kg (420lbs)
Programmable XYZ: XYZ travel: 300mm (11.8″) x 400mm (15.7″) x 100mm (3.9″)
XY tabletop: 305mm (12″) x 406mm (16″)
X-axis accuracy: 2.5um (100u”); X-axis precision: 1um (40u”)
Y-axis accuracy: 3um (120u”) ; Y-axis precision: 1um (40u”)
Z-axis accuracy: 1.25um (50u”) ; Z-axis precision: 1um (40u”)
Element Range: Aluminum 13 to Uranium 92
Analysis Layers and Elements: 5 layers (4 layers + base) and 10 elements in each layer.
Composition analysis of up to 25 elements simultaneously
Primary Filters: 4 primary filters
Digital Pulse Processing: 4096 CH digital multi-channel analyser with flexible shaping time. Automatic signal processing including dead time correction and escape peak correction
Processor: Intel, CORE i5 3470 (3.2GHz), 8GB DDR3 Memory,
Microsoft Windows 10 Prof, 64bit equivalent
Camera Optics: 1/4″ (6mm) CMOS-1280×720 VGA resolution
Power Supply: 150W, 100~240 volts; frequency range 47Hz to 63Hz
Dimensions (HxWxD): Internal: 735mm (29″) x 914mm (36″) x 100mm (4″)
External: 940mm (37″) x 990mm (39″) x 787mm (31″)
Other New Features: Z axis crash protection array
Auto focus and focus laser
Pattern recognition
Advanced custom data transfer