System Comparison Chart

Review the specifications for each coating measurement instrument below, and click on the series name to view the detailed unit page.
Note: A Series XRFs are SEMI S2, S8 compliant-ready

TUBE G SERIES B SERIES P SERIES L SERIES K SERIES O SERIES M SERIES W SERIES A SERIES
Micro-Focused X-ray Anode W/Cr/Mo/Rh W/Cr/Mo/Rh W/Cr/Mo/Rh W/Cr/Mo/Rh W/Cr/Mo/Rh W/Cr/Mo/Rh W/Cr/Mo/Rh W/Cr/Mo/Rh W/Cr/Mo/Rh
X-ray Path Bottom Up Top Down Top Down Top Down Top Down Top Down Top Down Top Down Top Down
DETECTOR
Si Drift Detector Standard Standard Standard Standard Standard Standard N/A N/A N/A
Large Window Si Drift Detector Optional Optional Optional Optional Optional Optional Standard Standard Standard
BEAM SIZE
Single Collimator Standard Standard N/A N/A N/A N/A N/A N/A N/A
Multi-Collimators N/A Optional Standard Standard Standard N/A N/A N/A N/A
Capillary Optics FWHM N/A N/A N/A Optional Coming Soon! 80um 15um 7.5um 7.5um
FOCAL DEPTH
Focus Laser / Auto Focus Standard Standard Standard Standard Standard Standard Standard Standard Standard
Single Fixed Focal Depth Standard Standard N/A N/A N/A Standard  Standard Standard Standard
Multi-Variable Focal Depths N/A Optional Standard Standard Standard N/A N/A N/A N/A
VIDEO MAGNIFICATION
30X Micro Standard Standard Standard Standard Standard N/A N/A N/A N/A
55X Micro Optional Optional Optional Optional Optional Standard N/A N/A N/A
140X Micro N/A N/A N/A N/A N/A N/A Standard Standard Standard
7X Digital Zoom Standard Standard Standard Standard Standard Standard Standard Standard Standard
9X Macro N/A N/A N/A N/A N/A N/A Standard Standard Standard
Table View N/A N/A N/A Optional Optional N/A Standard Standard Standard
STAGE & CHAMBER DIMENSIONS
Z Control Automatic Automatic Automatic Automatic Automatic Automatic Automatic Programmable Programmable
Z Travel 1″ 5.2″ 5.2″ 10″ 9″ 5.2″ 5.2″ 3.9″ 3.9″
Base N/A Fixed Programmable Programmable Programmable  Programmable Programmable Programmable Programmable
Standard XY Travel N/A N/A 5×6″ 10×10″ 12×12″  5×6″ 6.5×6.5″ 12×16″ 23×23″
Optional XY Travel 1.5×1.5″ N/A 10×10″ N/A N/A  10×10″ N/A N/A N/A
Optional Max XY Travel N/A N/A 16×16″ N/A N/A  16×16″ 16×16″ N/A N/A
Precision N/A N/A 0.0004″ 0.0004″ 0.0002″ 0.0004″ 0.0001″ 40u” 40u”
Chamber Dimensions HWD 4x13x12″ 5.5x12x13″ 5.5x12x13″ 11x22x24″ 24x24x9″ 5.5x12x13″ 5.4x12x13″ 4x29x36″ 4x55x58″
TOTAL WEIGHT
25kg 34kg 52-70kg 110kg 120kg 52-70kg 70kg 190kg 1000kg