Review the specifications for each coating measurement instrument below, and click on the series name to view the detailed unit page.
Note: A Series XRFs are SEMI S2, S8 compliant-ready
TUBE | G SERIES |
B SERIES |
P SERIES |
O SERIES |
M SERIES |
L SERIES |
W SERIES |
A SERIES |
---|---|---|---|---|---|---|---|---|
Micro-Focused X-ray Anode | W | W | W/Mo/Rh | Mo/Rh | Mo/Rh | W/Mo/Rh | Mo/Cr/W | Mo/Cr/W |
X-ray Path | Bottom Up | Top Down | Top Down | Top Down | Top Down | Top Down | Top Down | Top Down |
DETECTOR | ||||||||
Si Drift Detector | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard |
BEAM SIZE | ||||||||
Single Collimator | Standard | Standard | N/A | N/A | N/A | N/A | N/A | N/A |
Multi-Collimators | N/A | Optional | Standard | N/A | N/A | Standard | N/A | N/A |
Capillary Optics FWHM | N/A | N/A | N/A | 80um | 15um | Optional | 7.5um | 7.5um |
FOCAL DEPTH | ||||||||
Focus Laser / Auto Focus | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard |
Single Fixed Focal Depth | Standard | Standard | N/A | Standard | Standard | N/A | Standard | Standard |
Multi-Variable Focal Depths | N/A | Optional | Standard | N/A | N/A | Standard | N/A | N/A |
VIDEO MAGNIFICATION | ||||||||
30X Micro | Standard | Standard | Standard | N/A | N/A | Standard | N/A | N/A |
55X Micro | Optional | Optional | Optional | Standard | N/A | Optional | N/A | N/A |
140X Micro | N/A | N/A | N/A | N/A | Standard | N/A | Standard | Standard |
7X Digital Zoom | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Standard |
9X Macro | N/A | N/A | N/A | N/A | Standard | N/A | Standard | Standard |
Table View | N/A | N/A | N/A | N/A | Standard | N/A | Standard | Standard |
STAGE & CHAMBER DIMENSIONS | ||||||||
Z Control | Automatic | Automatic | Automatic | Automatic | Automatic | Automatic | Programmable | Programmable |
Z Travel | 1″ | 5.2″ | 5.2″ | 5.2″ | 5.2″ | 10″ | 3.9″ | 3.9″ |
Base | N/A | Fixed | Programmable | Programmable | Programmable | Programmable | Programmable | Programmable |
Standard XY Travel | N/A | N/A | 5×6″ | 5×6″ | 6.5×6.5″ | 10×10″ | 12×16″ | 22×23″ |
Optional XY Travel | 1.5×1.5″ | N/A | 10×10″ | 10×10″ | N/A | N/A | N/A | N/A |
Optional Max XY Travel | N/A | N/A | 16×16″ | 16×16″ | 16×16″ | N/A | N/A | N/A |
Precision | N/A | N/A | 0.0004″ | 0.0004″ | 0.0001″ | 0.0004″ | 40u” | 40u” |
Chamber Dimensions HWD | 4x13x12″ | 5.5x12x13″ | 5.5x12x13″ | 5.5x12x13″ | 5.4x12x13″ | 11x22x24″ | 4x29x36″ | 4x55x58″ |
TOTAL WEIGHT | ||||||||
25kg | 34kg | 52-70kg | 52-70kg | 70kg | 110kg | 190kg | 1000kg |