System Comparison Chart

Review the specifications for each coating measurement instrument below, and click on the series name to view the detailed unit page.
Note: A Series XRFs are SEMI S2, S8 compliant-ready

TUBE G
SERIES		 B
SERIES		 P
SERIES		 O
SERIES		 M
SERIES		 L
SERIES		 W
SERIES		 A
SERIES
Micro-Focused X-ray Anode W W W/Mo/Rh Mo/Rh Mo/Rh W/Mo/Rh Mo/Cr/W Mo/Cr/W
X-ray Path Bottom Up Top Down Top Down Top Down Top Down Top Down Top Down Top Down
DETECTOR
Si Drift Detector Standard Standard Standard Standard Standard Standard Standard Standard
BEAM SIZE
Single Collimator Standard Standard N/A N/A N/A N/A N/A N/A
Multi-Collimators N/A Optional Standard N/A N/A Standard N/A N/A
Capillary Optics FWHM N/A N/A N/A 80um 15um Optional 7.5um 7.5um
FOCAL DEPTH
Focus Laser / Auto Focus Standard Standard Standard Standard Standard Standard Standard Standard
Single Fixed Focal Depth Standard Standard N/A Standard Standard N/A Standard Standard
Multi-Variable Focal Depths N/A Optional Standard N/A N/A Standard N/A N/A
VIDEO MAGNIFICATION
30X Micro Standard Standard Standard N/A N/A Standard N/A N/A
55X Micro Optional Optional Optional Standard N/A Optional N/A N/A
140X Micro N/A N/A N/A N/A Standard N/A Standard Standard
7X Digital Zoom Standard Standard Standard Standard Standard Standard Standard Standard
9X Macro N/A N/A N/A N/A Standard N/A Standard Standard
Table View N/A N/A N/A N/A Standard N/A Standard Standard
STAGE & CHAMBER DIMENSIONS
Z Control Automatic Automatic Automatic Automatic Automatic Automatic Programmable Programmable
Z Travel 1″ 5.2″ 5.2″ 5.2″ 5.2″ 10″ 3.9″ 3.9″
Base N/A Fixed Programmable Programmable Programmable Programmable Programmable Programmable
Standard XY Travel N/A N/A 5×6″ 5×6″ 6.5×6.5″ 10×10″ 12×16″ 22×23″
Optional XY Travel 1.5×1.5″ N/A 10×10″ 10×10″ N/A N/A N/A N/A
Optional Max XY Travel N/A N/A 16×16″ 16×16″ 16×16″ N/A N/A N/A
Precision N/A N/A 0.0004″ 0.0004″ 0.0001″ 0.0004″ 40u” 40u”
Chamber Dimensions HWD 4x13x12″ 5.5x12x13″ 5.5x12x13″ 5.5x12x13″ 5.4x12x13″ 11x22x24″ 4x29x36″ 4x55x58″
TOTAL WEIGHT
25kg 34kg 52-70kg 52-70kg 70kg 110kg 190kg 1000kg