The A Series Micro XRF was engineered for precise measurement of the smallest X-ray features found in semiconductors and microelectronics. It accommodates very large PCB panels, or wafers of any size for full sample coverage and multi-point programmable automation.

Bowman's A Series uses poly-capillary optics to focus the X-ray beam to 7.5 μm FWHM, the world's smallest for coating thickness analysis using XRF instruments. A 140X magnification camera is used to measure features on that scale; it is accompanied by a secondary, low magnification camera for live-viewing samples and birds-eye macro-view imaging. Bowman's dual-camera system lets operators see the entire part, click the image to zoom with the high-mag camera, and pinpoint the feature to be programmed and measured.

A programmable X-Y stage with movement of 23.6 in (600 mm) in each direction can handle the
largest samples in the industry. The stage has precision less than +/- 1 μm for each axis and is
used to select and measure multiple points; Bowman pattern recognition software and auto-focus
features also do this automatically. The system's built-in pattern recognition can be used to view the topography of a coating on a part such as a silicon wafer.

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