O SERIES XRF

O Series XRF

Bowman brand XRF for Semiconductors

The O Series combines high performance with a small x-ray spot size. This is made possible by the poly-capillary focusing optics system that replaces the collimator assembly installed in standard Bowman systems. The optics are designed to focus the x-rays coming from the tube exit window to a very small spot size (80μm FWHM) while retaining virtually 100% of the tube flux. So instead of attenuating the x-rays that can’t fit through the small apertures, as is the case with collimator systems, the poly-capillary optics assembly allows almost all of the x-rays from the tube to reach the sample. The result is much greater sensitivity for testing very small components or thin coatings. Shorter test times can achieve even better repeatability when comparing optics systems vs. a similar sized collimator.

The standard configuration includes the 80μm optics, along with a high resolution SDD detector that can process the higher count rates. The camera has a greater magnification compared to other models like the P Series, with a 45x video magnification and 5x higher digital zoom. A programmable X-Y sample stage is also standard. The optics system has a very close focal distance, so O Series samples must be flat.

Application Performance

ENEPIG Electroless Nickel
μm Au μm Pd μm Ni μm NiP μm %P
Ave 0.0427 0.08 3.72 10.2015 10.17
StdDev 0.00045 0.0009 0.000985 0.1089 0.29
Range 0.0015 0.003 0.0395 0.3863 0.99
%RSD 1.053% 1.121% 0.265% 1.067% 2.85%

 

Complete this form to access the O Series PDF


The O Series XRF is best suited to customers with these requirements:

  • Very small parts/features such as semiconductors, connectors, or PCBs
  • Requirements to test many samples or locations per new lot of material
  • Need to measure very thin coatings (<100nm)
  • Very short measurement times (1-5 seconds)
  • Guaranteed to meet IPC-4552A, 4553A, 4554 and 4556
  • ASTM B568, DIN 50987 and ISO 3497

Product Specification

X-ray excitation: 50 W Mo target with Capillary Optics @80um FWHM
Detector: Silicon drifted detector with 135eV resolution
Number of analysis
layers and elements:
5 layers (4 layers + base) and 10 elements in each layer with composition analysis of up to 25 elements simultaneously
Filters/Collimators: 2 primary filters
Focal Depths: Fixed at 0.1″
Digital Pulse Processing: 4096 CH digital multi-channel analyser with flexible shaping time Automatic signal processing including dead time correction and escape peak correction
Computer: Intel, CORE i5 3470 Processor (3.2GHz), 8GB DDR3 Memory, Microsoft Windows 10 Prof, 64-bit equivalent
Camera optics: 1/4″ CMOS-1280×720 VGA resolution, 250X with Dual Camera or 45X with Single Camera on 15″ screen
Power Supply: 150W, 100-240 volts, with frequency range of 47Hz to 63Hz
Working Environment: 68°F (20°C) to 77°F (25°C) and up to 98% RH, non-condensing
Weight: 53kg
Programmable XY: Table size: 15″ x 13″ | Travel: 6″ x 5″
Internal Dimensions: Height: 140mm (5.5″), Width: 310mm (12″), Depth: 340mm (13″)
External Dimensions: Height: 450mm (18″), Width: 450mm (18″), Depth: 600mm ( 24″)