In-Line XRF Introduced

January, 2021 – Bowman has developed a fully automated in-line XRF system for plating measurements on 8 and 12” wafers. Based on Bowman M Series Micro XRF technology, the system uses poly-capillary optics to focus the X-ray beam to 7.5 µm FWHM, the smallest beam size for XRF plating thickness analysis.